JPS6232539U - - Google Patents
Info
- Publication number
- JPS6232539U JPS6232539U JP12256185U JP12256185U JPS6232539U JP S6232539 U JPS6232539 U JP S6232539U JP 12256185 U JP12256185 U JP 12256185U JP 12256185 U JP12256185 U JP 12256185U JP S6232539 U JPS6232539 U JP S6232539U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- view
- main pillar
- pillar
- cartridge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 24
- 230000005484 gravity Effects 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 19
- 238000000034 method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12256185U JPS6232539U (en]) | 1985-08-09 | 1985-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12256185U JPS6232539U (en]) | 1985-08-09 | 1985-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6232539U true JPS6232539U (en]) | 1987-02-26 |
Family
ID=31012864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12256185U Pending JPS6232539U (en]) | 1985-08-09 | 1985-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6232539U (en]) |
-
1985
- 1985-08-09 JP JP12256185U patent/JPS6232539U/ja active Pending